Inlet Automatic system for technological gases into a PACVD equipment

M.Vlad1, N.Lupsa2

1UNIMET S.A. Cluj-Napoca
2National Institute for Research and Development of Isotopic and Molecular Technologies, Cluj-Napoca, Ro-400293, Romania

	 The cover of the cutting tools with a heavy duty and anticorrosive plate is an important field in the plating in chemical vapors with plasma (PACVD). An important part of the PACVD equipment is the inlet of technological gases which has to assure a well determined chemical composition. The automatic setting of the pressure, in the technological room, of the flows of each gas assure the desired composition for superior performances. Those have been the crucial elements for the design of the system. 
	The system uses the following gases: nitrogen, hydrogen, argon, methane, vapors of tetrachlorethane. The vapors of tetrachlorethane are made by heating a bottle with liquid tetrachlorethane. The time sequence of the parameters and the monitoring of parameters is made by computerized program.