{"id":17,"date":"2023-11-02T07:50:34","date_gmt":"2023-11-02T07:50:34","guid":{"rendered":"https:\/\/www.itim-cj.ro\/xpic\/?page_id=17"},"modified":"2023-11-02T07:50:34","modified_gmt":"2023-11-02T07:50:34","slug":"objectives","status":"publish","type":"page","link":"https:\/\/www.itim-cj.ro\/xpic\/objectives\/","title":{"rendered":"Objectives"},"content":{"rendered":"\n<p><strong>General objective<\/strong><\/p>\n\n\n\n<p>This project aims at the realization of a new technological platform for the development of a EUV \u2013 soft X-ray integrated photonics.<\/p>\n\n\n\n<p><strong>Main objective<\/strong> of the project: development of the X-PIC platform and its validation.<\/p>\n\n\n\n<p><strong>Specific objectives<\/strong><\/p>\n\n\n\n<p><span style=\"text-decoration: underline;\">1. Development of a compact, high-power external driving laser<\/span>.<\/p>\n\n\n\n<p>This is based on the technology of optical parametric chirped-pulse amplification (OPCPA) to achieve the following target specifications: high-power (&gt;20 W) compact infrared (IR) driver laser with 1.5 &#8211; 2 mm tunable wavelength and &lt;30 fs pulse durations, with high stability criteria for carrier-envelope phase (&lt;300 mrad), beam pointing (&lt;5 \u03bcrad), and power (&lt; 1 %).<\/p>\n\n\n\n<p><span style=\"text-decoration: underline;\">2. Realization of novel integrated components working at high photon energies<\/span>.<\/p>\n\n\n\n<p>These integrated components will be realized by femtosecond laser micromachining (FLM) in fused silica substrates to withstand high laser intensities while ensuring good heat dissipation.<\/p>\n\n\n\n<p><em>The overall footprint of a typical integrated system will be on the millimeter scale<\/em>.<\/p>\n\n\n\n<p>The project will focus on the development of these basic functionalities:<\/p>\n\n\n\n<p>\u2022 EUV-SXR pulsed coherent source with high generation efficiency, reaching photon fluxes &gt;10<sup>11<\/sup> photons\/(eV\u00b7s) in the EUV and &gt;10<sup>9<\/sup> photons\/(eV\u00b7s) in the SXR;<\/p>\n\n\n\n<p>\u2022 efficient filters for separating the fundamental laser wavelength from the EUV-SXR radiation, with an IR attenuation &gt; 40 dB vs. a EUV attenuation &lt; 3 dB;<\/p>\n\n\n\n<p>\u2022 EUV-SXR beam splitters, delay lines and radiation manipulation devices (polarization shaping; integrated gratings).<\/p>\n\n\n\n<p><span style=\"text-decoration: underline;\">3. Validate technology with two working prototypes, from TRL1-2 to TRL3-4<\/span>, having a large relevance to industrial and technological applications:<\/p>\n\n\n\n<p>(1) EUV integrated interferometer for surface nanometrology,<\/p>\n\n\n\n<p>(2) a compact workstation for beyond-EUV lithography (working at &gt;90 eV, &lt;13.5 nm).<\/p>\n","protected":false},"excerpt":{"rendered":"<p>General objective This project aims at the realization of a new technological platform for the development of a EUV \u2013 soft X-ray integrated photonics. Main objective of the project: development [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-17","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.itim-cj.ro\/xpic\/wp-json\/wp\/v2\/pages\/17","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.itim-cj.ro\/xpic\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.itim-cj.ro\/xpic\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.itim-cj.ro\/xpic\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.itim-cj.ro\/xpic\/wp-json\/wp\/v2\/comments?post=17"}],"version-history":[{"count":1,"href":"https:\/\/www.itim-cj.ro\/xpic\/wp-json\/wp\/v2\/pages\/17\/revisions"}],"predecessor-version":[{"id":18,"href":"https:\/\/www.itim-cj.ro\/xpic\/wp-json\/wp\/v2\/pages\/17\/revisions\/18"}],"wp:attachment":[{"href":"https:\/\/www.itim-cj.ro\/xpic\/wp-json\/wp\/v2\/media?parent=17"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}